Dummy Wafer
Dummy wafers (also called as test wafers) are wafers mainly used for experiment and test and being different from general wafers for product.
Accordingly, reclaimed wafers are mostly applied as dummy wafers (test wafers).
Dummy wafers are often used in a production device to improve safety in the beginning of production process and are used for delivery check and evaluation of process form.
As dummy wafers are often used for experiment and test, size and thickness thereof are important factors in most occasions.
In each process, film thickness, pressure resistance, reflection index and presence of pinball are measured using dummy wafers (test wafers). Also, dummy wafers (test wafers) are used for measurement of pattern size, check of defect and so on in lithography.
Accordingly, reclaimed wafers are mostly applied as dummy wafers (test wafers).
Dummy wafers are often used in a production device to improve safety in the beginning of production process and are used for delivery check and evaluation of process form.
As dummy wafers are often used for experiment and test, size and thickness thereof are important factors in most occasions.
In each process, film thickness, pressure resistance, reflection index and presence of pinball are measured using dummy wafers (test wafers). Also, dummy wafers (test wafers) are used for measurement of pattern size, check of defect and so on in lithography.
